Heading 8486
Machines and apparatus of a kind used solely or principally for the manufacture of semiconductor boules or wafers, semiconductor devices, electronic integrated circuits or flat panel displays; machines & apparatus specified in note 11 (C) to this Chapter
848610
Machines and apparatus of a kind used solely or principally for the manufacture of semiconductor boules or wafers
848620
Machines and apparatus of a kind used solely or principally for the manufacture of semiconductor devices or of electronic integrated circuits
848630
Machines and apparatus of a kind used solely or principally for the manufacture of flat panel displays
848640
Machines and apparatus of a kind used solely or principally for the manufacture or repair of masks and reticles, assembling semiconductor devices or electronic integrated circuits, or for lifting, handling, loading or unloading items of heading 8486
848690
Machines and apparatus of heading 8486; parts and accessories